Materials Page 
Terminology
References 3 & 4

CeF3 (Cerium Fluoride)

Bulk Properties

Melting Point:  1430 ºC
Density: 6.0 gm/cc

Film Properties

Evap. Temp.: 1000 ºC
Film Growth: 
Film Hardness:  Soft

Common uses:   Multilayers.   IR antireflection coatings.  Thin film capacitors.

Comments:  Nice alternative to Thorium Fluoride.