Thin Film Design & Applications  
  
 
 
 
 
  
 

Materials Page 
Terminology
References 3 & 4

Ta2O5 (Tantalum pentoxide)
l (nm) n k
300 2.39  
400 2.2  
500 2.1  
600 2.09  
700 2.09  
800 2.08  
900 2.08  
1000 2.08  
1500 2.07  
2000 2.05  
8000 1.88  
9000 1.88 0.03
10000 1.88 0.235
11000 1.88 0.50
12000 1.88 0.66

Bulk Properties

Melting Point:  1800 ºC
Density: 8.2 gm/cc

 

Film Properties

Evap. Temp.: 2000 ºC
Film Growth:  crystalline
Film Hardness:  Very Hard

Common uses:  Multilayer coatings. 

Comments:  Very hard, adherent film.

 

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