Sc2O3 (Scandium Oxide)

Bulk Properties

Melting Point: 2300 ºC
Density: 3.8 gm/cc

Film Properties

Evap. Temp.: 2400 ºC
Film Growth: Amorphous
Film Hardness: Hard

Common uses: Multilayer coatings. UV coatings. Antireflection on semicoductor substrates.

Comments: High damage threshold at 0.35mm. Very stable film.