Thin Film Design & Applications  
  
 
 
 
 
 
 

Materials Page 
Terminology
References 3 & 4

Y2O3 (Yttrium Oxide)

l (nm) n
250 2.05
300 1.90
400 1.85
500 1.80
600 1.78
700 1.78
800 1.78
900 1.78
1000 1.77
1500 1.76
2000 1.73

Bulk Properties

Melting Point:  2410 ºC
Density: 5.01 gm/cc

 

 

Film Properties

Evap. Temp.:  2400 ºC
Film Growth:  Amorphous
Film Hardness:
  Hard

Common uses:  Multilayer coatings.  UV Coatings.  Environmental protection of silver and aluminum mirrors. Antireflection coatings.

Comments: Under low energy deposition conditions (i.e. resistive) or high pressure conditions, films may exhibit absorption bands at 2.9mm and 6.9mm due to water adsorption.  Preconditioning of material before evaporation at a reduced power for several minutes is recommended.

 

 

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